LIQUID PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a liquid processing apparatus which is able to discharge a process liquid to cups while inhibiting the occurrence of mist.SOLUTION: A liquid processing apparatus supplies a process liquid from a processing liquid supply part 40 to a rotating substrate W to perform li...

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Bibliographic Details
Main Authors TOJIMA JIRO, INOUE SHIGEHISA, MICHIKI YUICHI, AKUMOTO MASAMI
Format Patent
LanguageEnglish
Japanese
Published 07.05.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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