METHOD OF FORMING FINE PATTERN, PEELING METHOD, METHOD OF FORMING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING STAMPER

• Main Authors: KIMURA KAORI, TAKIZAWA KAZUTAKA, TAKEO AKIHIKO
• Format: Patent
• Language: English; Japanese
• Published: 23.03.2015
• Subjects: INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PHYSICS

PROBLEM TO BE SOLVED: To provide a pattern forming method ensuring precise pattern dimensions.SOLUTION: The pattern forming method includes the steps of: forming a processed layer over a substrate; preparing a noble metal microparticle layer coating liquid, which contains microparticles coated by high polymer material, by adding a second fluid dispersion a high polymer material which containing polymer chain having a base metal at the end thereof and a second solvent to a first fluid dispersion which contains noble metal microparticles and a first solvent; arranging noble metal microparticles coated by high polymer material over the processed layer by using the noble metal microparticle layer coating liquid; and transferring a rugged pattern of noble metal microparticles coated by the high polymer material. 【課題】パターン寸法精度が良好なパターン形成方法を得る。【解決手段】基板上に被加工層を形成する工程と、貴金属微粒子と第１の溶媒とを含む第１の分散液に、卑金属を末端に有する高分子鎖を含む高分子材料と第２の溶媒とを含む第２の分散液を添加し、高分子材料により被覆された微粒子が分散された貴金属微粒子層塗布液を作製する工程、貴金属微粒子層塗布液を用いて被加工層上に高分子材料により被覆された貴金属微粒子を配列させる工程と、高分子材料により被覆された貴金属微粒子の凹凸パターンを被加工層へ転写する工程とを含むパターン形成方法が提供される。【選択図】図１