METHOD FOR RECOVERING CERIUM ABRASIVES
PROBLEM TO BE SOLVED: To provide a method for recovering cerium abrasives, which can obtain high-purity recycled polishing material, from polishing material slurry containing used cerium abrasives.SOLUTION: A method for recovering cerium abrasives comprises a slurry recovery step of recovering polis...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
19.02.2015
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Subjects | |
Online Access | Get full text |
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