METHOD FOR RECOVERING CERIUM ABRASIVES

PROBLEM TO BE SOLVED: To provide a method for recovering cerium abrasives, which can obtain high-purity recycled polishing material, from polishing material slurry containing used cerium abrasives.SOLUTION: A method for recovering cerium abrasives comprises a slurry recovery step of recovering polis...

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Bibliographic Details
Main Authors NAGAI YUKI, MAEZAWA AKIHIRO, INUI CHIE, HIRAYAMA NATSUMI
Format Patent
LanguageEnglish
Japanese
Published 19.02.2015
Subjects
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