DEVICE AND METHOD FOR SURFACE INSPECTION

• Main Authors: TSUCHIYAMA HIROSHI, NOGUCHI MINORU, MORIYAMA ICHIRO, TANABE YOSHIKAZU, KENBO YUKIO, HACHIKAKE YASUO, WATANABE KENJI, ISHIMARU ICHIRO
• Format: Patent
• Language: English; Japanese
• Published: 13.11.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a surface inspection device and a surface inspection method, which can discriminate scratches in various shapes occurring on a surface of a processed object (for example, an insulator film on a semiconductor substrate) from foreign materials attached to the processed...