MODULE INSPECTION DEVICE FOR VACUUM PROCESSING DEVICE

• Main Authors: TAUCHI TSUTOMU, OGAWA KEITARO, TANAKA SATOMI, MIZOBE YUYA, HORIHASHI FUMIO, YAMAZAKI YASUHIRO, KAWAGUCHI MICHINORI, TAKEGAWA YUUSUKE, MORISHITA YUKI
• Format: Patent
• Language: English
• Published: 25.08.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To make it possible to inspect per vacuum processing chamber formed in a module.SOLUTION: A module inspection device for a vacuum processing device comprises: a conveyance container connected to the sample carry-in port of a vacuum processing module, which is to be inspected, a...