MODULE INSPECTION DEVICE FOR VACUUM PROCESSING DEVICE

• Main Authors: TAUCHI TSUTOMU, OGAWA KEITARO, TANAKA SATOMI, MIZOBE YUYA, HORIHASHI FUMIO, YAMAZAKI YASUHIRO, KAWAGUCHI MICHINORI, TAKEGAWA YUUSUKE, MORISHITA YUKI
• Format: Patent
• Language: English
• Published: 25.08.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To make it possible to inspect per vacuum processing chamber formed in a module.SOLUTION: A module inspection device for a vacuum processing device comprises: a conveyance container connected to the sample carry-in port of a vacuum processing module, which is to be inspected, and having a first opening that can be opened or closed for carrying in or out a sample; conveyance means provided in the conveyance container and configured to convey the sample to the vacuum processing module to be inspected; a gate valve configured to open/close the first opening of the conveyance container; exhaust means configured to reduce pressure and exhaust air in the conveyance container; gas supply means configured to supply purge gas into the conveyance container; a connection part configured to connect the connection terminal of the vacuum processing module to be inspected; and control means configured to input or store information from the vacuum processing module to be inspected, and also to give an instruction to the vacuum processing module. The control means checks the opening/closing states of the gate valve of the sample carry-in port of the vacuum processing module to be inspected and the gate valve of the first opening of the conveyance container, thereby operating the exhaust means for the vacuum processing module and the conveyance container.