SPIN COATING DEVICE AND SPIN COATING METHOD
PROBLEM TO BE SOLVED: To provide a spin coating device which can prevent infiltration of coating liquid into a gap between a side face of a base material end and a peripheral plate making an extension plane of a principal face of a base material along an entire periphery of the side and can prevent...
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Main Author | |
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Format | Patent |
Language | English |
Published |
01.05.2014
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Subjects | |
Online Access | Get full text |
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