SPIN COATING DEVICE AND SPIN COATING METHOD

• Main Author: SHINOHARA YUICHIRO
• Format: Patent
• Language: English
• Published: 01.05.2014
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPARATUS SPECIALLY ADAPTED THEREFOR; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SEMICONDUCTOR DEVICES; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a spin coating device which can prevent infiltration of coating liquid into a gap between a side face of a base material end and a peripheral plate making an extension plane of a principal face of a base material along an entire periphery of the side and can prevent occurrence of foreign matter and occurrence of device contamination in a post-process in the spin coating device having a structure for suppressing wind at a corner of the base material.SOLUTION: A spin coating device includes: a mechanism for placing a plate-like base material to rotate it; a fixing jig for fixing the base material onto a rotary shaft; a peripheral plate whose plane is extended in all directions in the same heights as a principal face of the base material and whose side face is brought into contact with a side face to be an end of the base material; and a mechanism which drops coating liquid on the principal face of the base material. The side face of the peripheral plate, which is brought into contact with the base material, has liquid-repellent property.