BAKING-TREATMENT SYSTEM

• Main Authors: ORIMO FUMIO, KOIZUMI KENJIRO, NARISHIMA MASAKI, HAYASHI TERUYUKI
• Format: Patent
• Language: English
• Published: 06.02.2014
• Subjects: ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a baking-treatment system which enables an efficient treatment at a low cost in baking an organic material film printed on a large-size substrate by ink-jet printing.SOLUTION: A baking-treatment system 100 comprises: a vacuum-baking device (VB) 1 for baking an organic material film formed on a substrate S by an external ink-jet printing device (IJ) 200 under a pressure of an atmospheric pressure or less; a transport device 11 for transporting the substrate S to the vacuum-baking device (VB) 1; a transport chamber (TR) 10 provided adjacently to the vacuum-baking device 1, and housing the transport device 11, which can be evacuated; a load-lock device (LL) 20 provided adjacently to the transport chamber (TR) 10, and arranged to be able to switch between an atmospheric pressure condition and a vacuum condition; and a transport device 31 disposed on a substrate-transporting path between the ink-jet printing device (IJ) 200 and the load-lock device (LL) 20, and performing the delivery and reception of the substrate S in at least a part of the substrate-transporting path.