CHARGED PARTICLE BEAM DEVICE

• Main Authors: NODA HIROYUKI, TOMITA SHINICHI, SATO MITSUGU, NISHIMURA MASAKO, IIIZUMI NORIKO, TAMOCHI RYUICHIRO, KOI ASAMI, SHIGEFUJI NORIYUKI, WATANABE TOSHIYA
• Format: Patent
• Language: English
• Published: 21.03.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a charged particle beam device having a parameter-adjustment-training function for anyone to easily learn a manual adjustment technique on the background, about which in recent years, a charged particle beam device such as a scanning electron microscope has been gaining widespread users, and every one of the users is required to learn the manual adjustment technique, but it is very difficult to adjust all parameters for observation to appropriate values, and therefore, beginners have difficulty in fully bringing out the performance of the device.SOLUTION: In order to solve a problem, training means for focus adjustment and astigmatism adjustment is provided. A focus condition of an object lens and control conditions of an X-direction astigmatism corrector and a Y-direction astigmatism corrector are set according to operation of a user, a training image corresponding to the control conditions is read from a storage device, depending on a set of the set focus condition, X-direction astigmatism correction condition, and Y-direction astigmatism correction condition, and the image is displayed on a screen.