BROKEN WAFER RECOVERY SYSTEM

• Main Authors: CRAIG LYLE STEVENS, BRANIGAN WENDELL THOMAS, BERKSTRESSER DAVID ERIC
• Format: Patent
• Language: English
• Published: 13.12.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an apparatus and method for recovery and cleaning, especially beneficial for fabrication systems using silicon wafer carried on trays.SOLUTION: A broken substrate removable system for use in a substrate processing system is provided, comprising: a suction head 362 ha...