MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR HAVING PIEZOELECTRIC VIBRATOR, ELECTRONIC APPARATUS AND ELECTRIC WAVE CLOCK

PROBLEM TO BE SOLVED: To provide a through hole of a piezoelectric vibrator which can cope with the miniaturization.SOLUTION: The through hole of the piezoelectric vibrator, in which a piezoelectric vibration piece is encapsulated in a cavity formed between a lid substrate and a base substrate const...

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Bibliographic Details
Main Author FUNABIKI YOICHI
Format Patent
LanguageEnglish
Published 18.10.2012
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Summary:PROBLEM TO BE SOLVED: To provide a through hole of a piezoelectric vibrator which can cope with the miniaturization.SOLUTION: The through hole of the piezoelectric vibrator, in which a piezoelectric vibration piece is encapsulated in a cavity formed between a lid substrate and a base substrate constituted of a glass material, is formed as follows. One through hole is formed in the base substrate, and a pair of through electrodes are arranged in the through hole. A glass frit 6a is charged and is solidified by calcination so as to seal the through hole. A pair of the through electrodes are arranged in one through hole so that one through hole is made for one piezoelectric vibrator, thereby improving flexural strength and also coping with miniaturization of the piezoelectric vibrator.
Bibliography:Application Number: JP20110062003