DEFECT INSPECTION DEVICE, DEFECT INFORMATION ACQUISITION DEVICE AND DEFECT INSPECTION METHOD

• Main Author: KAWAKI KOJI
• Format: Patent
• Language: English
• Published: 21.06.2012
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a defect inspection device, a defect information acquisition device and a defect inspection method, capable of optimizing further an acquisition amount of a scattered light signal regarding the defect by improving a detection accuracy of the defect to be as the detec...