LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE, AND PIEZOELECTRIC ACTUATOR

• Main Author: SHIMADA KATSUTO
• Format: Patent
• Language: English
• Published: 19.04.2012
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a liquid injection head, a liquid injection device, and a piezoelectric actuator in which occurrence of failures such as peeling can be suppressed by improving the amount of displacement.SOLUTION: The liquid injection head includes: a passage forming substrate 10 in which a pressure development chamber 12 communicating to a nozzle opening is formed; and a piezoelectric actuator 300 which has a lower electrode 60 provided on the passage forming substrate 10, a piezoelectric layer 70 formed on the lower electrode 60, and an upper electrode 80 formed on the piezoelectric layer 70. The upper electrode 80 is formed of a plurality of electrode layers 81 and 82. The electrode layer 81, which is one of the electrode layers forming the upper electrode 80, has a compression stress. The electrode layer 82, which is the other of the electrode layers forming the upper electrode 80, has a compression stress that is smaller than the compression stress of the electrode layer 81 which has a compression stress. The internal stress of the whole upper electrode 80 has a compression stress.