MANUFACTURING METHOD OF ELECTRODE SUBSTRATE FOR ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrode substrate for organic EL display devices capable of forming a transparent conductive layer which has an optimal film thickness for each hue.SOLUTION: A method includes: forming a first transparent conductive layer 14 made of ITO...

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Bibliographic Details
Main Authors NAKAGAWA TAIRA, KAKINUMA NOBUAKI, YOSHITOKU DAISUKE, OSHIGE HIDEMASA, TAKAGI SHINYA
Format Patent
LanguageEnglish
Published 08.03.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrode substrate for organic EL display devices capable of forming a transparent conductive layer which has an optimal film thickness for each hue.SOLUTION: A method includes: forming a first transparent conductive layer 14 made of ITO; after crystallization by bake treatment, forming a protective layer 21 having an opening 22 in a desired region; depositing amorphous ITO; removing a second transparent conductive layer 15' of amorphous ITO by etching; and leaving a second transparent conductive layer 15 made of crystallized ITO only in the desired region similarly to the lower first transparent conductive layer 14.
Bibliography:Application Number: JP20100190225