SUBSTRATE HOLDING CASE, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS

• Main Author: MORITA HARUYUKI
• Format: Patent
• Language: English
• Published: 28.07.2011
• Subjects: ADVERTISING; BASIC ELECTRIC ELEMENTS; CONVEYING; CRYPTOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DISPLAY; DISPLAYING; EDUCATION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; HANDLING THIN OR FILAMENTARY MATERIAL; LABELS OR NAME-PLATES; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; SEALS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; SIGNS; STORING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a substrate processing method capable of quickly collecting glass fragments when a glass substrate is broken in a chamber. SOLUTION: The substrate processing method of performing surface processing on the glass substrate arranged in the chamber is characterized in that: the glass substrate 10 stored in a recessed substrate holding case 20 having an opening on the top is carried into the chamber; and the surface processing is performed on the glass substrate 10 while being stored in the substrate holding case 20. COPYRIGHT: (C)2011,JPO&INPIT