THIN FILM VAPOR DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LUMINESCENT DISPLAY DEVICE USING THE SAME

• Main Authors: OH JI-SOOK, KANG HEE CHEOL, KIM SANGSOO, KIN SHOKEN
• Format: Patent
• Language: English
• Published: 10.03.2011
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a thin film vapor deposition apparatus suitable for a mass production process of a large substrate having a highly precise pattern, and a method for manufacturing an organic luminescent display device using the same. SOLUTION: The thin film vapor deposition apparatus comprises: a plurality of chambers that are maintained in vacuum states and contain a thin film deposition assembly 100 for carrying out vapor deposition of a thin film on a substrate 500; and a carrier that moves an electrostatic chuck 600 so that it passes through the chamber. The electrostatic chuck 600 comprises: a body equipped with a supporting surface that contacts a target substrate for vapor deposition and supports the substrate; an electrode that is housed inside the body and generates electrostatic force on the supporting surface; and a battery that is mounted on the body and is electrically connected to the electrode. The method for manufacturing the organic luminescent display device uses the apparatus. COPYRIGHT: (C)2011,JPO&INPIT