ELECTRON BEAM DEVICE

• Main Authors: MITAMURA SHIGEHIRO, TAKASHIMA TORU
• Format: Patent
• Language: English
• Published: 03.03.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide an electron beam device capable of carrying out vacuuming between O-rings of a double-seal structure made of two pieces of O-rings inexpensively. SOLUTION: A first vacuum pump RP2 for exhausting an electron gun portion 16, a second vacuum pump DP for exhausting a sample room 12 are provided, while, first exhaust routes D7, D4 connecting a double O-ring space S1 of the double-seal structure for sealing an opening/closing part of the electron gun portion 16 and the first vacuum pump RP2, and a second exhaust route D6 for connecting the double O-ring space S1 and the sample room 12 are provided. When the electron gun portion 16 is opened, the second exhaust route D6 is shut off, and directly after closing of the electron gun portion 16, the first exhaust routes D7, D4 are communicated with each other to roughly vacuum the double O-ring space S1 and the electron gun portion 16 with the first vacuum pump RP2, and later, the first exhaust routes D7, D4 are shut off to communicate the second exhaust route D6, and the double O-ring space S1 is exhausted by the second vacuum pump DP through the sample room 12. COPYRIGHT: (C)2011,JPO&INPIT