POSITION MEASURING APPARATUS, COATING METHOD, AND COATING PROGRAM AND COATING APPARATUS

• Main Authors: MASUDA YASUYUKI, KASUGA TOSHINORI, KOBAYASHI TAISAN, KAWASHIMA NOBUAKI, OZAKI YUKIO
• Format: Patent
• Language: English
• Published: 22.07.2010
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PHYSICS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To acquire position information of an object with high accuracy by measurement in a single direction. SOLUTION: A position measuring apparatus 1100 included in a coating apparatus 1000 includes a distance measuring part which measures a distance in the horizontal direction to each of three measurement points 400a1, 400a2, and 400a3 on a measurement plane 400a of a substrate 400. The distance measuring part includes three displacement sensors 1110, 1120, and 1130. These displacement sensors 1110, 1120, and 1130 are arranged to face a vertical virtual plane 600. The position measuring apparatus 1100 includes an imaging part which images a projected image on the measurement plane 400a of the substrate 400 in the horizontal direction. The imaging part includes an imaging sensor 1150 and an image acquisition part 1160 to which the imaging sensor 1150 is connected. COPYRIGHT: (C)2010,JPO&INPIT