GAS EMITTING SPEED MEASURING DEVICE AND MEASURING METHOD THEREWITH

• Main Authors: TANAKA TERUMITSU, YAMAMOTO SETSUO, KURISU SHINKI
• Format: Patent
• Language: English
• Published: 22.04.2010
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a gas emitting speed measuring device and a measuring method therewith measuring with high measurement accuracy capable of measuring continuously from onset of vacuum exhaust over super-wide range ranging with order-eight less than 10-5to 10-12Pam/s. SOLUTION: The gas emitting speed measuring device measuring the emitting speed of a gas emitted from a measured sample 5 prepared in a vacuum chamber 1 includes first upstream-side vacuum sections 6a and 11a the measured sample is prepared, second upstream-side vacuum section 6b and 11b being the same dimension and consisting of the same inner wall material as the first upstream-side vacuum section, a downstream-side vacuum chamber 7 connected to the first and the second upstream-side vacuum sections, a vacuum evacuating means implementing vacuum evacuating of the downstream-side vacuum chamber, first and second variable orifices 2a and 2b arranged between the first and second upstream-side vacuum sections and the downstream-side vacuum chamber, respectively, and a partition wall 12 prepared within the downstream-side vacuum chamber to limit air flow between the first and the second variable orifices and measures gas emitting speed of the measured sample by implementing vacuum evacuating of the downstream-side vacuum chamber to measure the pressures of the first and the second upstream-side vacuum section. COPYRIGHT: (C)2010,JPO&INPIT