LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND ACTUATOR

• Main Author: SHIMADA KATSUTO
• Format: Patent
• Language: English
• Published: 05.11.2009
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a liquid ejecting head which can enhance durability by suppressing destruction of a piezoelectric layer while securing a full displacement amount by improving displacement characteristics of a piezoelectric element, and to provide a liquid ejecting apparatus and an actuator. SOLUTION: In the liquid ejecting head, an end face of the piezoelectric layer 70 includes a tilting surface which tilts towards its outside. A lower electrode 60 constituting each piezoelectric element 300 is formed with a narrower width than a width of a pressure generation chamber 12. The piezoelectric layer 70 is formed with a wider width than the width of the lower electrode 60. An end face of the lower electrode 60 is hence covered with the piezoelectric layer. A top layer of a diaphragm 50 includes an insulator film 52 formed of titanium oxide (TiOx), and a top layer of the lower electrode 60 includes an orientation control layer 62 formed of lanthanum nickel oxide (LaNiyOx). Moreover, the orientation control layer 62 and at least the piezoelectric layer 70a on the orientation control layer 62 are composed of crystals of the perovskite structure having a crystal face orientation of a (110) preferred orientation. COPYRIGHT: (C)2010,JPO&INPIT