METHOD OF PROCESSING OBJECT TO BE HOUSED AND COVER OPENING/CLOSING SYSTEM USED THEREFOR

PROBLEM TO BE SOLVED: To reduce partial pressure of an oxidizing gas inside when FOUP is closed while it is being fixed to the FIMS system and is in the opening state. SOLUTION: A curtain nozzle, which can form a gas curtain, is arranged above the upper side of an opening 10, in addition to a purge...

Full description

Saved in:
Bibliographic Details
Main Authors ABE TOMOSHI, EMOTO ATSUSHI, OKABE TSUTOMU
Format Patent
LanguageEnglish
Published 19.02.2009
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To reduce partial pressure of an oxidizing gas inside when FOUP is closed while it is being fixed to the FIMS system and is in the opening state. SOLUTION: A curtain nozzle, which can form a gas curtain, is arranged above the upper side of an opening 10, in addition to a purge gas feed nozzle which is provided outside both sides of the opening 10 within the FIMS. When a pod 2 is closed by a cover 4, a door opening/closing mechanism is used to incline the cover 4 by a predetermined angle to the flowing direction of the curtain gas and its state is kept for a predetermined time, and the purge gas fed to the gas curtain by a cover 4 is also used for purging within a pod. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070198622