METHOD OF FORMING THIN FILM USING LIQUID MATERIAL

• Main Author: TSUTSUI YOSHITAKA
• Format: Patent
• Language: English
• Published: 11.12.2008
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING

PROBLEM TO BE SOLVED: To efficiently form a thin film having a large area using an inkjet system instead of the conventional film forming method of a sputter method or a transfer printing system. SOLUTION: An even liquid film is formed by filling up a base plate surface with circles depicted by a landing diameter D of a liquid material ejected from an inkjet, and disposing liquid drops by the inkjet at the centers of the circles so as to interconnect liquid drops each other. Further, a disposition for efficiently filling up the base plate surface with the circles depicted by the landing diameter D is given by a conditional formula. COPYRIGHT: (C)2009,JPO&INPIT