MICROMECHANICAL RESONATOR

• Main Authors: NAGASAKI HIRONORI, TAMANO AKIMASA
• Format: Patent
• Language: English
• Published: 30.10.2008
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; RESONATORS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a micromechanical resonator capable of using a resonance frequency in a frequency band higher than that of a conventional micromechanical resonator. SOLUTION: The micromechanical resonator has, on a substrate 7, a resonator 2 having a plane shape parallel to the subs...