MICROMECHANICAL RESONATOR

• Main Authors: NAGASAKI HIRONORI, TAMANO AKIMASA
• Format: Patent
• Language: English
• Published: 30.10.2008
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; RESONATORS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a micromechanical resonator capable of using a resonance frequency in a frequency band higher than that of a conventional micromechanical resonator. SOLUTION: The micromechanical resonator has, on a substrate 7, a resonator 2 having a plane shape parallel to the substrate 7, and a pair of electrodes 30 and 31 disposed on both sides of the resonator 2. The resonator 2 has a thin disk portion 20 disposed at a center part and a thick annular portion 50 which is thicker than the thin disk portion 20 and encloses the thin disk portion 20. The thick annular portion 50 is supported on the substrate 7 and the pair of electrodes 30 and 31 form a gap portion with the thin disk portion 20 of the resonator 2. A main voltage is applied to the resonator 2, and a high-frequency signal is input to the pair of electrodes 30 and 31, so that variation in electrostatic capacity between the resonator 2 and pair of electrodes 30 and 31 is output in the form of a high-frequency signal. COPYRIGHT: (C)2009,JPO&INPIT