MICROMECHANICAL RESONATOR

PROBLEM TO BE SOLVED: To provide a micromechanical resonator capable of using a resonance frequency in a frequency band higher than that of a conventional micromechanical resonator. SOLUTION: The micromechanical resonator has, on a substrate 7, a resonator 2 having a plane shape parallel to the subs...

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Bibliographic Details
Main Authors NAGASAKI HIRONORI, TAMANO AKIMASA
Format Patent
LanguageEnglish
Published 30.10.2008
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
RESONATORS
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a micromechanical resonator capable of using a resonance frequency in a frequency band higher than that of a conventional micromechanical resonator. SOLUTION: The micromechanical resonator has, on a substrate 7, a resonator 2 having a plane shape parallel to the substrate 7, and a pair of electrodes 30 and 31 disposed on both sides of the resonator 2. The resonator 2 has a thin disk portion 20 disposed at a center part and a thick annular portion 50 which is thicker than the thin disk portion 20 and encloses the thin disk portion 20. The thick annular portion 50 is supported on the substrate 7 and the pair of electrodes 30 and 31 form a gap portion with the thin disk portion 20 of the resonator 2. A main voltage is applied to the resonator 2, and a high-frequency signal is input to the pair of electrodes 30 and 31, so that variation in electrostatic capacity between the resonator 2 and pair of electrodes 30 and 31 is output in the form of a high-frequency signal. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070105772