AIR BLASTING METHOD AND DEVICE FOR HARD AND BRITTLE MATERIAL

PROBLEM TO BE SOLVED: To provide air blasting device and method simplifying a structure capable of easily forming a fine hole or a groove of an aspect ratio of ≥2.0 in a planar workpiece made of a hard and brittle material. SOLUTION: In this air blasting device, an injection material for polishing i...

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Bibliographic Details
Main Authors AOYAMA NAOKI, SHIBUYA NORIHITO, HORIUCHI TSUKASA, YAMAMOTO KIYOHI
Format Patent
LanguageEnglish
Published 02.10.2008
Subjects
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