ACTUATOR DEVICE, METHOD OF MANUFACTURING SAME, AND LIQUID JETTING HEAD

• Main Author: KURIKI AKIRA
• Format: Patent
• Language: English
• Published: 03.07.2008
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide an actuator device that not only improves the piezoelectric characteristics but also prevents the durability deterioration, a method of manufacturing same, and a liquid jetting head. SOLUTION: The actuator device includes a lower electrode 60 disposed on a substrate 10, a piezoelectric substance element layer 70 comprising a lead zirconate titanate formed on the lower electrode 60 and having a rhombohedral structure, and a piezoelectric element 300 comprising an upper electrode 80 disposed on the piezoelectric substance element layer 70. The piezoelectric substance element layer 70 is formed of a step structure in which a crystal is divided in a thickness direction. The proportion of titanium to zirconium of a first piezoelectric substance element layer 71 on a side of the lower electrode 60 in which the crystal of the piezoelectric substance element layer 70 is divided is set to be higher than that of the titanium to the zirconium of a second piezoelectric substance element layer 70 beneath a side of the upper electrode 80 in which the crystal of the piezoelectric substance element layer 70 is divided. COPYRIGHT: (C)2008,JPO&INPIT