APPARATUS AND METHOD FOR DROPPING LIQUID MATERIAL
PROBLEM TO BE SOLVED: To provide an apparatus or a method for dropping a liquid material for improving a dropping precision of the liquid material. SOLUTION: The apparatus for dropping a liquid material 10 for discharging the liquid material from a nozzle 23 to drop it on a substrate 1 comprises a c...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English |
Published |
18.01.2007
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide an apparatus or a method for dropping a liquid material for improving a dropping precision of the liquid material. SOLUTION: The apparatus for dropping a liquid material 10 for discharging the liquid material from a nozzle 23 to drop it on a substrate 1 comprises a control apparatus 36 for controlling discharge of the liquid material from the nozzle 23 from a temperature of the liquid material. COPYRIGHT: (C)2007,JPO&INPIT |
---|---|
Bibliography: | Application Number: JP20050194209 |