ACQUISITION METHOD FOR DRIVE CONTROLLING CORRECTION DATA
PROBLEM TO BE SOLVED: To provide an acquisition method for a drive controlling correction data for a mobile body for smoothly and precisely moving the mobile body moved by two drive shafts. SOLUTION: On a single mobile body 13 fed linearly by a first drive means and a second drive means individually...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
30.11.2006
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Subjects | |
Online Access | Get full text |
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