METHOD FOR MANUFACTURING CARBON NANOTUBE THIN FILM, METHOD FOR MANUFACTURING ELECTRONIC ELEMENT, METHOD FOR MANUFACTURING THIN FILM, METHOD FOR MANUFACTURING STRUCTURE, AND METHOD FOR FORMING BUBBLE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon nanotube thin film by which the carbon nanotube thin film can be uniformly formed with ease and with high film thickness controllability. SOLUTION: Bubbles 16 carrying carbon nanotubes on their surfaces are formed by mixing a gas s...

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Bibliographic Details
Main Authors FUJINO TOSHIO, KO KOKIN
Format Patent
LanguageEnglish
Published 02.11.2006
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOUNDS THEREOF
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon nanotube thin film by which the carbon nanotube thin film can be uniformly formed with ease and with high film thickness controllability. SOLUTION: Bubbles 16 carrying carbon nanotubes on their surfaces are formed by mixing a gas such as air into a carbon nanotube dispersion 12 containing a surfactant. A carbon nanotube thin film is formed by accumulating the bubbles 16 on a substrate 15. This carbon nanotube thin film is used, e.g. as the channel material of FET. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20050125118