COMPOSITE MICROSCOPE

• Main Author: FUJIMOTO HIROHISA
• Format: Patent
• Language: English
• Published: 25.05.2006
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

PROBLEM TO BE SOLVED: To enable further broad analysis of a sample. SOLUTION: An LSM image and an SPM image are stored in an iamge information memory 22a by a CPU 18 in conformity with XY coordinates on a sample 5, and Z-coordinate position information Dz of the SMP image is stored in a height infor...