FAST MODEL-BASED OPTICAL PROXIMITY CORRECTION
PROBLEM TO BE SOLVED: To provide a fast and high-performance projection optics simulation method and system with a non-scalar (i.e. "non-Hopkins") effect taken into account. SOLUTION: A generalized bilinear kernel independent of a mask transmission function is formed to include various inf...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
02.09.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | PROBLEM TO BE SOLVED: To provide a fast and high-performance projection optics simulation method and system with a non-scalar (i.e. "non-Hopkins") effect taken into account. SOLUTION: A generalized bilinear kernel independent of a mask transmission function is formed to include various influences, and the kernel is processed by decomposition to compute an image including a non-scalar effect. Dominant eigenfunctions of the generalized bilinear kernel can be used to previously compute a convolution with possible polygon sectors. Then a mask transmission function can be decomposed into polygon sectors, and a weighted pre-image may be formed from a coherent sum of the pre-computed convolution for appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can be used to perform MBOPC (model-based optical proximity correction). COPYRIGHT: (C)2005,JPO&NCIPI |
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AbstractList | PROBLEM TO BE SOLVED: To provide a fast and high-performance projection optics simulation method and system with a non-scalar (i.e. "non-Hopkins") effect taken into account. SOLUTION: A generalized bilinear kernel independent of a mask transmission function is formed to include various influences, and the kernel is processed by decomposition to compute an image including a non-scalar effect. Dominant eigenfunctions of the generalized bilinear kernel can be used to previously compute a convolution with possible polygon sectors. Then a mask transmission function can be decomposed into polygon sectors, and a weighted pre-image may be formed from a coherent sum of the pre-computed convolution for appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can be used to perform MBOPC (model-based optical proximity correction). COPYRIGHT: (C)2005,JPO&NCIPI |
Author | SEONG NAKGEUON HINSBERG WILLIAM D HOFFNAGLE JOHN A LVOV ALEXEY Y GORDON RONALD L SANCHEZ MARTHA I ROSENBLUTH ALAN E GALLATIN GREGG M HOULE FRANCES A |
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Snippet | PROBLEM TO BE SOLVED: To provide a fast and high-performance projection optics simulation method and system with a non-scalar (i.e. "non-Hopkins") effect taken... |
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Title | FAST MODEL-BASED OPTICAL PROXIMITY CORRECTION |
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