DECOMPOSITION METHOD AND DECOMPOSITION APPARATUS OF PFC GAS

• Main Authors: SAITO TATSUHISA, ABE TOSHIYUKI
• Format: Patent
• Language: English
• Published: 30.06.2005
• Edition: 7
• Subjects: ACYCLIC OR CARBOCYCLIC COMPOUNDS; APPARATUS THEREFOR; CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG]; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; GENERAL METHODS OF ORGANIC CHEMISTRY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; METALLURGY; ORGANIC CHEMISTRY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To develop a PFC gas (perfluoro compound) decomposition method capable of decomposing PFC gas without forcible addition of reaction water in the case of treating waste gas containing the PFC gas and acidic gas. SOLUTION: The PFC gas decomposition method involves removing an acidic gas by bringing a waste gas containing 0.5% or less PFC into contact with water by a gas-liquid contact apparatus 7 and introducing the resulting waste gas into a heated catalyst layer to decompose PFC gas. Reaction gas, which is either air or oxygen, is added to the waste gas to prevent generation of a CO component. Further, reaction gas, which is either air or oxygen, is added to a waste gas containing 0.5% or more PFC to forcibly lower the PFC concentration to 0.5% or less to reliably decompose the PFC gas. Evaporated steam of water supplied in the acidic gas decomposition step is made to follow the waste gas by setting the PFC concentration to be 0.5% or less and thus the PFC gas decomposition is carried out. COPYRIGHT: (C)2005,JPO&NCIPI