SURFACE INSPECTION APPARATUS FOR INSPECTING PRESENCE OR ABSENCE OF CRACKS IN SEMICONDUCTOR SUBSTRATE

• Main Authors: KIKUCHI MASATO, KIDA HIROAKI, SEKIDA SABURO
• Format: Patent
• Language: English
• Published: 14.04.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a surface inspection apparatus for substrates, capable of detecting processors which processor have troubles in composite semiconductor manufacturing equipment, consisting of a plurality of substrate processors made in-line. SOLUTION: The schlieren-method surface ins...