NON-CONTACT ELECTRIC CONDUCTIVITY MEASUREMENT SYSTEM

• Main Authors: SAKA MASUMI, ABE HIROYUKI, KYO AKIRA
• Format: Patent
• Language: English
• Published: 24.06.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a non-contact electric conductivity measurement system by applying a microwave. SOLUTION: The conductivity measurement system irradiates a surface of silicon wafer (test piece) 160 with the microwave generated in a network analyzer (NA) 110 through a wave guide tube 130, and a sensor 140, and the reflected microwave is received by the sensor 140. From an amplitude ratio A and a phase difference θ with respect to the reflected microwave of the silicon wafer 160 measured by the net work analyzer (NA) 110, the conductivity of the silicon wafer 160 is measured by calculating it with a personal computer 120. The personal computer 120 is not only calculating for measurement but also controlling the whole system (e.g. positioning the test piece). COPYRIGHT: (C)2004,JPO