FIELD EMISSION TYPE ELECTRON MICROSCOPE

• Main Authors: ATAKA KEIICHI, MORIYAMA KAZUHIKO, KOBAYASHI TAKASHI, SHIROTA KOHEI, YAMAMOTO TAKEHISA, IKUHARA YUUICHI, YANAKA TAKASHI
• Format: Patent
• Language: English
• Published: 15.08.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a field emission type electron microscope capable of utilizing superior interferential performance, and capable of vanishing or reducing interferential performance when necessary. SOLUTION: This field emission type electron microscope has a field emission type electron gun for emitting an electron beam, a deflection coil for scanning a sample by deflecting the electron beam, a deflecting power source for supplying a deflecting current to the deflection coil, and an accelerating voltage power source for supplying accelerating voltage to the field emission type electron gun. A switching means is arranged in the deflecting power source for superimposing a scanning signal for scanning in a prescribed shape on the deflecting current, and the interferential performance of the electron beam is reduced or vanished by vibrating the electron beam. Or the switching means is arranged in the accelerating voltage power source for superimposing a signal from an oscillating circuit for changing an accelerating power source, and the interferential performance of the electron beam is reduced or vanished by changing accelerating voltage. COPYRIGHT: (C)2003,JPO