LAMINATED BLOCK AND ITS MANUFACTURING METHOD, ELECTROMAGNETIC ACTUATOR, STAGE UNIT USING THE SAME, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

• Main Author: KIKUCHI TOSHIHIDE
• Format: Patent
• Language: English
• Published: 13.09.2002
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; INDUCTANCES; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MAGNETS; MATERIALS THEREFOR; METAL-WORKING NOT OTHERWISE PROVIDED FOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SEMICONDUCTOR DEVICES; TRANSFORMERS; TRANSPORTING

PROBLEM TO BE SOLVED: To enable a protective film to be formed on the surface of a core (laminated block) used for an electromagnetic actuator or the like without deteriorating the shape of the core in accuracy. SOLUTION: Many magnetic thin sheets 21 and 31 whose surfaces are covered with an insulating film 24 are laminated and bonded together with adhesive 25 for the formation of laminated blocks 22 and 32. The laminated blocks 22 and 32 are subjected to electroless nickel plating, so that a nickel film 26 is formed at least on laminate surfaces 22A and 32A. The nickel film 26 is 5 to 20 μm in thickness. The laminated blocks 22 and 32 are used as an I core 20 and an E core for an electromagnetic actuator 100.