E-TYPE ELECTROMAGNET, ACTUATOR, STAGE UNIT, ALIGNER, AND METHOD OF MANUFACTURING DEVICE

• Main Author: KIKUCHI TOSHIHIDE
• Format: Patent
• Language: English
• Published: 02.08.2002
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; INDUCTANCES; MAGNETS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SEMICONDUCTOR DEVICES; TRANSFORMERS

PROBLEM TO BE SOLVED: To provide an E-type electromagnet which is capable of increasing its coil in number of turns. SOLUTION: A winding 5 is wound in parallel on each layer on the left, right and underside of an E-type electromagnet, and as shown in an enlarged part of Figure (b), the winding 5 of the following layer is so set as to be laid in a recessed part produced between the adjacent windings 5 of the lower layer. Therefore, provided that the diameter and number of layers of the winding 5 are represented by (d) and (n) respectively, the thickness T of the coil is represented by a formula, T=d 1+31/2(n-1)/2}. But, as shown in the enlarged part of the Figure (b) and Figure (d), the winding 5 of the upper layer must get over the winding 5 of the lower layer at a turnover part, so that the thickness T of the layers of the windings 5 at the turnover part is represented by a formula, T=d×n, wherein (d) denotes the diameter of the winding 5, and (n) denotes the number of the layers of the windings 5. Therefore, the coil gets thicker at the turnover part than at the other part. In this practical form, the turnover part is provided above the center projection 5 where no dimensional limitation is imposed.