METHOD AND DEVICE FOR TESTING NONUNIFORMITY OF PERIODIC PATTERN

• Main Authors: OKAZAWA ATSUSHI, CHINJU TAKUTETSU, NISHIDA MASASHI, SOEDA MASAHIKO
• Format: Patent
• Language: English
• Published: 15.02.2002
• Edition: 7
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To accurately test area deviation that partially takes place in a pattern in testing the area deviation of a periodic pattern on the basis of an area image. SOLUTION: An image means obtained by arranging a pixel string in a cross direction picks up an image of a test object having a periodic pattern in which a pattern of a prescribed width is repeated in a cross direction and inputs a pattern image, an area is measured in each block in which a pixel string (line) is made as a unit in regard to each pattern on the inputted pattern image, the measured area of each block is respectively converted into a luminance value, each converted luminance value is respectively set in a unit pixel in which a pixel is made as a unit, the area image is prepared by arranging unit pixels in which each luminance value is respectively set while associating with the sequence of each block, and area deviation and its nonconformity are tested on the basis of the prepared area image.