METHOD AND DEVICE FOR CLASSIFYING PLATE-SHAPED MEMBER BY THICKNESS

PROBLEM TO BE SOLVED: To enhance the reliability for the classification and quality and also enhance productivity. SOLUTION: A device is provided with a first unit group 2 measuring the thickness of photomasks m1 as a subject to be classified and assorting photomasks m2 by thickness based on the mea...

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Bibliographic Details
Main Author OTSU AKIRA
Format Patent
LanguageEnglish
Published 27.11.2001
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To enhance the reliability for the classification and quality and also enhance productivity. SOLUTION: A device is provided with a first unit group 2 measuring the thickness of photomasks m1 as a subject to be classified and assorting photomasks m2 by thickness based on the measured results, a second unit group 3 sticking labels 31 on which data is printed on respective packaged materials (photomasks m3 packaged by a shrinkable film 26) after packaging a plurality of photomasks m2 having a same thickness assorted by the first unit group 2 as a unit, and a controller 4 driving the second unit group 3 and the first unit group 2.
Bibliography:Application Number: JP20000149425