X-RAY ANALYTICAL EQUIPMENT AND ITS EVACUATION-VACUUM LEAK METHOD

PROBLEM TO BE SOLVED: To provide an X-ray analytical equipment and its evacuation-vacuum leak method capable of making, efficient analysis without damages to a samples S, by controlling an evacuation and vacuum leak operation of an auxiliary exhaust hood 24, corresponding to the kind of the sample S...

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Bibliographic Details
Main Author YAMAMOTO ETSUHISA
Format Patent
LanguageEnglish
Published 26.10.2001
Edition7
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide an X-ray analytical equipment and its evacuation-vacuum leak method capable of making, efficient analysis without damages to a samples S, by controlling an evacuation and vacuum leak operation of an auxiliary exhaust hood 24, corresponding to the kind of the sample S in the X-ray analytical equipment. SOLUTION: In this X-ray analytical equipment 1, in which the sample S is carried in/out through the auxiliary exhaust hood 24 between the outside and an analysis chamber 2 in a vacuum state, the auxiliary exhaust hood 24 is evacuated at a low speed, and then evacuated at a high speed, when the pressure in the auxiliary exhaust hood 24 reaches a prescribed first switching pressure P1.
Bibliography:Application Number: JP20000110432