FILM FORMING DEVICE OF HARD CARBON FILM

• Main Authors: SUMIYA TORU, HAYASHI TAKESHI, NAKAMORI HIDEKI, MIURA SHUJI
• Format: Patent
• Language: English
• Published: 30.01.2001
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide an ion source for forming a hard carbon film capable of forming a hard carbon film excellent in adhesion, capable of forming a film even on a substrate having a complicated shape and also small in restriction concerning the device, to provide a film forming device provided with the ion source, to provide a film forming method using the film forming device and to provide an article in which the hard carbon film excellent in adhesion has been formed. SOLUTION: An ion source for forming a hard carbon film has an ion generating part arranged in a vacuum chamber 1 in which a gaseous starting material essentially consisting of gaseous hydrocarbon is introduced, and the gaseous hydrocarbon is ionized and a power source part feeding electricity thereto. The ion generating part has a filament 9 releasing thermoelectrons and an anode 6 accelerating the thermoelectrons, and the power source part has a filament heating power source 10 electrically heating the filament, an anode power source 7 making the potential of the anode in to the positive one to the filament and an ion source power source 8 making the potentials of the filament heating power source and the anode power source in to the prescribed ones. In this case, a glue element is attached to the filament.