SUBSTRATE POSITION DETECTING APPARATUS

PROBLEM TO BE SOLVED: To enable accurate detection of the misalignment of a substrate without being affected by material and the end part shape of the substrate, to simplify the adjusting operation in installation, or to receive limitations on the location of installation. SOLUTION: In a substrate p...

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Bibliographic Details
Main Author NOSE MATSUO
Format Patent
LanguageEnglish
Published 18.02.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To enable accurate detection of the misalignment of a substrate without being affected by material and the end part shape of the substrate, to simplify the adjusting operation in installation, or to receive limitations on the location of installation. SOLUTION: In a substrate position detecting apparatus for detecting lateral misalignment of a substrate W, when the substrate W is carried into a processing chamber 5a having an opening G by a substrate transporting robot 4a, a pair of contact sensors 1, 2 for detecting their contact with the substrate are disposed at the positions on both sides of the transportation path for the substrate W and on this side of the opening G of the processing chamber 5a at a spacing larger than the width of the substrate W and moreover smaller than the width of the opening G, and at the same time lateral detecting means 3 is provided for detecting the lateral misalignment of the substrate, based on the detection signal from the pair of the contact sensors 1, 2.
Bibliography:Application Number: JP19980217756