METHOD AND DEVICE WITH ENHANCED ION DOPING

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Main Authors MAO, Duli, TAI, Hsin-Chih, RHODES, Howard E. E, CHEN, Gang
Format Patent
LanguageChinese
English
Published 12.05.2017
Subjects
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Author TAI, Hsin-Chih
MAO, Duli
RHODES, Howard E. E
CHEN, Gang
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DocumentTitleAlternate 具有增强離子摻雜的方法及裝置
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title METHOD AND DEVICE WITH ENHANCED ION DOPING
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