Method
A vapour deposition method for preparing an amorphous lithium borosilicate or doped lithium borosilicate compound 29 comprises providing a flow of vapour sources of at least lithium, oxygen, boron and silicon 18, 20, 22, 24 to co-deposit the component elements on a substrate 14, which react to form...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
09.06.2021
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Subjects | |
Online Access | Get full text |
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