MEMS devices and processes
A MEMS transducer configured to operate as a microphone, the MEMS transducer comprising a flexible membrane, the flexible membrane having a first surface and a second surface, wherein the first surface of the flexible membrane is fluidically isolated from the second surface of the flexible membrane....
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
25.03.2020
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Subjects | |
Online Access | Get full text |
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