Interferometric position sensor

An interferometric position sensor comprises a light source 110, a beam splitter 134 and a detector array 170. The beam splitter splits light between two paths and an interference pattern 180 is formed based on a difference in length between the two paths. At least one of the paths is dependent on t...

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Bibliographic Details
Main Authors Christopher Ralph Carter, Ross Matthew Williams
Format Patent
LanguageEnglish
Published 09.05.2018
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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