Interferometric position sensor
An interferometric position sensor comprises a light source 110, a beam splitter 134 and a detector array 170. The beam splitter splits light between two paths and an interference pattern 180 is formed based on a difference in length between the two paths. At least one of the paths is dependent on t...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
09.05.2018
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Subjects | |
Online Access | Get full text |
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