Micro-fabricated electrokinetic pump

• Main Authors: GOODSON E KENNETH, THOMAS WILLIAM KENNY JR, JUAN G SANTIAGO, SHULIN ZENG, DAVID CORBIN
• Format: Patent
• Language: English
• Published: 12.04.2006
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BYUSING INERTIA OF FLUID TO BE PUMPED; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; SIPHONS; WEAPONS

An electrokinetic pump fabricated by using semiconductor processing and etching steps. The pump comprising a substrate 501 with a porous structure 502 frit to an interface formed with the substrate. A plurality of support structures 506 are formed from the substrate thereby forming a plurality of su...