Micro-fabricated electrokinetic pump

An electrokinetic pump fabricated by using semiconductor processing and etching steps. The pump comprising a substrate 501 with a porous structure 502 frit to an interface formed with the substrate. A plurality of support structures 506 are formed from the substrate thereby forming a plurality of su...

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Bibliographic Details
Main Authors GOODSON E KENNETH, THOMAS WILLIAM KENNY JR, JUAN G SANTIAGO, SHULIN ZENG, DAVID CORBIN
Format Patent
LanguageEnglish
Published 12.04.2006
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BYUSING INERTIA OF FLUID TO BE PUMPED
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SIPHONS
WEAPONS
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Summary:An electrokinetic pump fabricated by using semiconductor processing and etching steps. The pump comprising a substrate 501 with a porous structure 502 frit to an interface formed with the substrate. A plurality of support structures 506 are formed from the substrate thereby forming a plurality of support apertures 508 between the support structures. A voltage differential applied between the interface and a surface of the porous frit drives a liquid from the plurality of support apertures through the porous structure to the surface. The porous structure has a plurality of pores which extend from the surface to the interface.
Bibliography:Application Number: GB20060001516